Magnetron Sputtering System

Magnetron sputtering system - Torr CRC602-2G2

Manufacture: Torr CRC602-2G2

Capabilities

  • Two 2” cathodes with DC and RF power supplies
  • 4.5” diameter substrate stage
  • 600 W DC power supply
  • 300 W RF package with auto matching network controller
  • Two 2” cathodes with DC and RF power supplies
  • 4.5” diameter substrate stage
  • 600 W DC power supply
  • 300 W RF package with auto matching network controller
  • Programmable mass flow controller
  • TwisTorr 80 l/sec turbo pump

BRIC

Baylor Research and Innovation Collaborative

100 Research Pkwy
Waco, TX 76704

(254) 710-6778

(254) 710-4665